00514nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002400092245006400116260003200180300002000212490003300232856010300265IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819461964 (Print)  cIIA Library  aLin, Qinghuang, ed. 0aAdvances in Resist Technology and Processing XXIIIh[eBook]  aWashington, USAbSPIEc2006  aOnline resource  aProceedings of SPIE; V. 6153  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/6153yClick Here to Access eBook