@book{23360,
	author = {Lin, Qinghuang, ed.},
	title = {Advances in Resist Technology and Processing XXIII},
	publisher = {SPIE},
	year = {2006},
	series = {Proceedings of SPIE; V. 6153},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/6153}
}