TY  - BOOK
AU  - Sturtevant, John, ed.
TI  - Advances in Resist Technology and Processing XXI
T2  - Proceedings of SPIE; V. 5376
SN  - 9780819452894 (Print)
PY  - 2004///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5376
ER  -