00514nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002600092245006200118260003200180300002000212490003300232856010300265IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819452894 (Print)  cIIA Library  aSturtevant, John, ed. 0aAdvances in Resist Technology and Processing XXIh[eBook]  aWashington, USAbSPIEc2004  aOnline resource  aProceedings of SPIE; V. 5376  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5376yClick Here to Access eBook