@book{23358,
	author = {Sturtevant, John, ed.},
	title = {Advances in Resist Technology and Processing XXI},
	publisher = {SPIE},
	year = {2004},
	series = {Proceedings of SPIE; V. 5376},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5376}
}