00517nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245006100122260003200183300002000215490003300235856010300268IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819448446 (Print)  cIIA Library  aFedynyshyn, Theodore, ed. 0aAdvances in Resist Technology and Processing XXh[eBook]  aWashington, USAbSPIEc2003  aOnline resource  aProceedings of SPIE; V. 5039  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/5039yClick Here to Access eBook