@book{23357,
	author = {Fedynyshyn, Theodore, ed.},
	title = {Advances in Resist Technology and Processing XX},
	publisher = {SPIE},
	year = {2003},
	series = {Proceedings of SPIE; V. 5039},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/5039}
}