TY  - BOOK
AU  - Houlihan, Francis, ed.
TI  - Advances in Resist Technology and Processing XVIII
T2  - Proceedings of SPIE; V. 4345
SN  - 9780819440310 (Print)
PY  - 2001///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4345
ER  -