TY  - BOOK
AU  - Houlihan, Francis, ed.
TI  - Advances in Resist Technology and Processing XVII
T2  - Proceedings of SPIE; V. 3999
SN  - 9780819436177 (Print)
PY  - 2000///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3999
ER  -