00516nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002700092245006300119260003200182300002000214490003300234856010300267IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819436177 (Print)  cIIA Library  aHoulihan, Francis, ed. 0aAdvances in Resist Technology and Processing XVIIh[eBook]  aWashington, USAbSPIEc2000  aOnline resource  aProceedings of SPIE; V. 3999  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3999yClick Here to Access eBook