@book{23355,
	author = {Houlihan, Francis, ed.},
	title = {Advances in Resist Technology and Processing XVII},
	publisher = {SPIE},
	year = {2000},
	series = {Proceedings of SPIE; V. 3999},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3999}
}