00513nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006200117260003200179300002000211490003300231856010300264IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819431523 (Print)  cIIA Library  aConley, Willard, ed. 0aAdvances in Resist Technology and Processing XVIh[eBook]  aWashington, USAbSPIEc1999  aOnline resource  aProceedings of SPIE; V. 3678  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3678yClick Here to Access eBook