@book{23354,
	author = {Conley, Willard, ed.},
	title = {Advances in Resist Technology and Processing XVI},
	publisher = {SPIE},
	year = {1999},
	series = {Proceedings of SPIE; V. 3678},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3678}
}