TY  - BOOK
AU  - Conley, Willard, ed.
TI  - Advances in Resist Technology and Processing XV
T2  - Proceedings of SPIE; V. 3333
SN  - 9780819427786 (Print)
PY  - 1998///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3333
ER  -