00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006100117260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819427786 (Print)  cIIA Library  aConley, Willard, ed. 0aAdvances in Resist Technology and Processing XVh[eBook]  aWashington, USAbSPIEc1998  aOnline resource  aProceedings of SPIE; V. 3333  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3333yClick Here to Access eBook