@book{23353,
	author = {Conley, Willard, ed.},
	title = {Advances in Resist Technology and Processing XV},
	publisher = {SPIE},
	year = {1998},
	series = {Proceedings of SPIE; V. 3333},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3333}
}