TY  - BOOK
AU  - Fedynyshyn, Theodore, ed.
TI  - Advances in Resist Technology and Processing XIX
T2  - Proceedings of SPIE; V. 4690
SN  - 9780819444363 (Print)
PY  - 2002///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4690
ER  -