00518nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003000092245006200122260003200184300002000216490003300236856010300269IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819444363 (Print)  cIIA Library  aFedynyshyn, Theodore, ed. 0aAdvances in Resist Technology and Processing XIXh[eBook]  aWashington, USAbSPIEc2002  aOnline resource  aProceedings of SPIE; V. 4690  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/4690yClick Here to Access eBook