@book{23352,
	author = {Fedynyshyn, Theodore, ed.},
	title = {Advances in Resist Technology and Processing XIX},
	publisher = {SPIE},
	year = {2002},
	series = {Proceedings of SPIE; V. 4690},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/4690}
}