TY  - BOOK
AU  - Tarascon-Auriol, Regine, ed.
TI  - Advances in Resist Technology and Processing XIV
T2  - Proceedings of SPIE; V. 3049
SN  - 9780819424631 (Print)
PY  - 1997///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3049
ER  -