00521nam a2200145Ia 4500003000900000008004100009020002600050040001600076100003300092245006200125260003200187300002000219490003300239856010300272IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819424631 (Print)  cIIA Library  aTarascon-Auriol, Regine, ed. 0aAdvances in Resist Technology and Processing XIVh[eBook]  aWashington, USAbSPIEc1997  aOnline resource  aProceedings of SPIE; V. 3049  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/3049yClick Here to Access eBook