@book{23351,
	author = {Tarascon-Auriol, Regine, ed.},
	title = {Advances in Resist Technology and Processing XIV},
	publisher = {SPIE},
	year = {1997},
	series = {Proceedings of SPIE; V. 3049},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/3049}
}