TY  - BOOK
AU  - Kunz, Roderick, ed.
TI  - Advances in Resist Technology and Processing XIII
T2  - Proceedings of SPIE; V. 2724
SN  - 9780819421005 (Print)
PY  - 1996///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2724
ER  -