@book{23350,
	author = {Kunz, Roderick, ed.},
	title = {Advances in Resist Technology and Processing XIII},
	publisher = {SPIE},
	year = {1996},
	series = {Proceedings of SPIE; V. 2724},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2724}
}