TY  - BOOK
AU  - Allen, Robert, ed.
TI  - Advances in Resist Technology and Processing XII
T2  - Proceedings of SPIE; V. 2438
SN  - 9780819417862 (Print)
PY  - 1995///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2438
ER  -