@book{23349,
	author = {Allen, Robert, ed.},
	title = {Advances in Resist Technology and Processing XII},
	publisher = {SPIE},
	year = {1995},
	series = {Proceedings of SPIE; V. 2438},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2438}
}