TY  - BOOK
AU  - Nalamasu, Omkaram, ed.
TI  - Advances in Resist Technology and Processing XI
T2  - Proceedings of SPIE; V. 2195
SN  - 9780819414908 (Print)
PY  - 1994///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2195
ER  -