@book{23348,
	author = {Nalamasu, Omkaram, ed.},
	title = {Advances in Resist Technology and Processing XI},
	publisher = {SPIE},
	year = {1994},
	series = {Proceedings of SPIE; V. 2195},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/2195}
}