TY  - BOOK
AU  - Hinsberg, William, ed.
TI  - Advances in Resist Technology and Processing X
T2  - Proceedings of SPIE; V. 1925
SN  - 9780819411594 (Print)
PY  - 1993///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1925
ER  -