@book{23347,
	author = {Hinsberg, William, ed.},
	title = {Advances in Resist Technology and Processing X},
	publisher = {SPIE},
	year = {1993},
	series = {Proceedings of SPIE; V. 1925},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1925}
}