TY  - BOOK
AU  - Ito, Hiroshi, ed.
TI  - Advances in Resist Technology and Processing VIII
T2  - Proceedings of SPIE; V. 1466
SN  - 9780819405654 (Print)
PY  - 1991///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1466
ER  -