TY  - BOOK
AU  - Watts, Mike, ed.
TI  - Advances in Resist Technology and Processing VII
T2  - Proceedings of SPIE; V. 1262
SN  - 9780819403094 (Print)
PY  - 1990///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1262
ER  -