@book{23345,
	author = {Watts, Mike, ed.},
	title = {Advances in Resist Technology and Processing VII},
	publisher = {SPIE},
	year = {1990},
	series = {Proceedings of SPIE; V. 1262},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1262}
}