TY  - BOOK
AU  - Reichmanis, Elsa, ed.
TI  - Advances in Resist Technology and Processing VI
T2  - Proceedings of SPIE; V. 1086
SN  - 9780819401212 (Print)
PY  - 1989///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1086
ER  -