@book{23344,
	author = {Reichmanis, Elsa, ed.},
	title = {Advances in Resist Technology and Processing VI},
	publisher = {SPIE},
	year = {1989},
	series = {Proceedings of SPIE; V. 1086},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1086}
}