TY  - BOOK
AU  - Novembre, Anthony, ed.
TI  - Advances in Resist Technology and Processing IX
T2  - Proceedings of SPIE; V. 1672
SN  - 9780819408273 (Print)
PY  - 1992///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1672
ER  -