@book{23342,
	author = {Novembre, Anthony, ed.},
	title = {Advances in Resist Technology and Processing IX},
	publisher = {SPIE},
	year = {1992},
	series = {Proceedings of SPIE; V. 1672},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/1672}
}