00740nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003100092245006100123260003200184300002000216490003300236856010300269942000700372999001700379952016200396IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892528066 (Print)  cIIA Library  aBowden, Murrae, ed.941880 0aAdvances in Resist Technology and Processing IVh[eBook]  aWashington, USAbSPIEc1987  aOnline resource  aProceedings of SPIE; V. 0771  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0771yClick Here to Access eBook  cEB  c23341d23341  00104070aBANbBANd2011-07-01eSPIEhV. 771l0pEB2801r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0771w2021-11-05yEB