TY  - BOOK
AU  - Bowden, Murrae, ed.
TI  - Advances in Resist Technology and Processing IV
T2  - Proceedings of SPIE; V. 0771
SN  - 9780892528066 (Print)
PY  - 1987///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0771
ER  -