00744nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003400092245006200126260003200188300002000220490003300240856010300273942000700376999001700383952016200400IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892526666 (Print)  cIIA Library  aWillson, C. Grant, ed.941879 0aAdvances in Resist Technology and Processing IIIh[eBook]  aWashington, USAbSPIEc1986  aOnline resource  aProceedings of SPIE; V. 0631  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0631yClick Here to Access eBook  cEB  c23340d23340  00104070aBANbBANd2011-07-01eSPIEhV. 631l0pEB2800r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0631w2021-11-05yEB