TY  - BOOK
AU  - Willson, C. Grant, ed.
TI  - Advances in Resist Technology and Processing III
T2  - Proceedings of SPIE; V. 0631
SN  - 9780892526666 (Print)
PY  - 1986///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0631
ER  -