00741nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245006100124260003200185300002000217490003300237856010300270942000700373999001700380952016200397IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525744 (Print)  cIIA Library  aThompson, Larry, ed.941878 0aAdvances in Resist Technology and Processing IIh[eBook]  aWashington, USAbSPIEc1985  aOnline resource  aProceedings of SPIE; V. 0539  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0539yClick Here to Access eBook  cEB  c23339d23339  00104070aBANbBANd2011-07-01eSPIEhV. 539l0pEB2799r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0539w2021-11-05yEB