00512nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245006100117260003200178300002000210490003300230856010300263IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780892525744 (Print)  cIIA Library  aThompson, Larry, ed. 0aAdvances in Resist Technology and Processing IIh[eBook]  aWashington, USAbSPIEc1985  aOnline resource  aProceedings of SPIE; V. 0539  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/0539yClick Here to Access eBook