@book{23339,
	author = {Thompson, Larry, ed.},
	title = {Advances in Resist Technology and Processing II},
	publisher = {SPIE},
	year = {1985},
	series = {Proceedings of SPIE; V. 0539},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/0539}
}