00753nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003200092245007200124260003200196300002000228490003300248856010300281942000700384999001700391952016300408IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819494641 (Print)  cIIA Library  aSomervell, Mark, ed.941877 0aAdvances in Resist Materials and Processing Technology XXXh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8682  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8682yClick Here to Access eBook  cEB  c23338d23338  00104070aBANbBANd2011-07-01eSPIEhV. 8682l0pEB2798r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8682w2021-11-05yEB