00523nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002500092245007200117260003200189300002000221490003300241856010300274IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819494641 (Print)  cIIA Library  aSomervell, Mark, ed. 0aAdvances in Resist Materials and Processing Technology XXXh[eBook]  aWashington, USAbSPIEc2013  aOnline resource  aProceedings of SPIE; V. 8682  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/8682yClick Here to Access eBook