@book{23338,
	author = {Somervell, Mark, ed.},
	title = {Advances in Resist Materials and Processing Technology XXX},
	publisher = {SPIE},
	year = {2013},
	series = {Proceedings of SPIE; V. 8682},
	address = {Washington, USA},
	url = {https://www.spiedigitallibrary.org/conference-proceedings-of-spie/8682}
}