00754nam a2200181Ia 4500003000900000008004100009020002600050040001600076100003000092245007500122260003200197300002000229490003300249856010300282942000700385999001700392952016300409IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819485311 (Print)  cIIA Library  aAllen, Robert, ed.941876 0aAdvances in Resist Materials and Processing Technology XXVIIIh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 7972  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7972yClick Here to Access eBook  cEB  c23337d23337  00104070aBANbBANd2011-07-01eSPIEhV. 7972l0pEB2797r2021-11-05uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7972w2021-11-05yEB