TY  - BOOK
AU  - Allen, Robert, ed.
TI  - Advances in Resist Materials and Processing Technology XXVIII
T2  - Proceedings of SPIE; V. 7972
SN  - 9780819485311 (Print)
PY  - 2011///
CY  - Washington, USA
PB  - SPIE
UR  - https://www.spiedigitallibrary.org/conference-proceedings-of-spie/7972
ER  -