00524nam a2200145Ia 4500003000900000008004100009020002600050040001600076100002300092245007500115260003200190300002000222490003300242856010300275IN-BaIIA211028s9999    xx      s     000 0 eng d  a9780819485311 (Print)  cIIA Library  aAllen, Robert, ed. 0aAdvances in Resist Materials and Processing Technology XXVIIIh[eBook]  aWashington, USAbSPIEc2011  aOnline resource  aProceedings of SPIE; V. 7972  uhttps://www.spiedigitallibrary.org/conference-proceedings-of-spie/7972yClick Here to Access eBook